- Ukongezwa simahla, i-PVD izisa ezinye izibonelelo ezinjengokuphuma okuphezulu kunye ne-OpEx ephantsi yokusetyenzwa kweeseli zelanga ze-TOPCon.
- I-CapEx ephezulu kunye nokuprintwa kweenyawo zizinto eziphantsi zobuchwepheshe
- Ngokutsho kweTaiyangNews TOPcon Solar Cell Report 2021, iJietai kuphela kwenkampani ebonelela ngemveliso yorhwebo esekwe kwiPVD ye-TOPCon, ngelixa iPolar PV kunye neVon Ardenne bezisebenza kwiimveliso nazo.
Nabuphi na obunye ubuchwephesha bokubekwa kwi-LPCVD kwizicelo ze-TOPCon zisimahla. Kwaye kunjalo ngePhysical Vapor Deposition (PVD), indlela elandelwa ngabathengisi bezixhobo ezimbalwa kunye nabavelisi. Itekhnoloji ixhasa ukusebenza okuphezulu kakhulu, ukugcinwa okuphantsi (xa kuthelekiswa ne-LPCVD) kunye neendleko zokusebenza, kodwa ushicilelo oluphezulu lweenyawo kunye ne-capex zezo zikwi-flip side.
Ngaphezulu kwe-PVD: I-Jietai yaseTshayina iphuhlise iqonga letekhnoloji ye-hybrid ebizwa ngokuba yi-POPAID edibanisa i-PVD kunye ne-plasma oxidation ukujongana neziphene zobuchwephesha obukhoyo be-TOPCon (Umthombo: Jietai)
Ngobuchwephesha iwela phantsi kodidi lwePVD, esekwe eTshayina Jietai ikhetha ukuba iteknoloji yayo ibizwe ngokuba yi-POPAID, emfutshane kwi-Plasma Oxidation kunye ne-Plasma Assisted In-situ Doping. Ngokwenene, iteknoloji ingaphezulu kwePVD; idibanisa i-PVD kunye ne-plasma oxidation kwiqonga lesixhobo esinye. I-Jiangsu Jietai Photoelectric Corp LTD (Jietai) ibisebenza kubonelelo lwezixhobo zelanga malunga neshumi leminyaka ngoku, ngokugxila kwayo okokuqala ukomisa okomileyo izixhobo ikakhulu eyenzelwe multicrystalline. Ngo-2019, inkampani yaqala ukusebenza kwisisombululo sayo esisekwe kwi-PVD ngenjongo yokujongana neziphene zezinye iitekhnoloji zokubeka, ngakumbi ukujikeleza. Isixhobo senkampani senza onke amanyathelo ayimfuneko kwi-TOPCon - ukwakheka kwe-tunneling oxide, i-polysilicon deposition kunye ne-in-situ doping.
Inkampani isebenzisa umthombo we-plasma we-plasma omgca we-oxidation, othi ngokutsho kwe-Jietai CEO uQuanyuan Shang uxhasa i-throughput ephezulu, umonakalo ophantsi kwaye unikezela ngeqondo eliphezulu lolawulo. I-output ye-reactors yisayizi ye-wafer; iyakwazi ukucubungula i-10,000 ye-wafers ye-G1 ngeyure, ihla ukuya kwi-8,000 xa ilungisa ii-wafers ze-M10. “Injongo kukufumana i-1 GW enemigca emibini enxuseneyo (oomatshini), yindlela esilinganise ngayo isixhobo,” utshilo uShang. Olu gqithiso lukwi-polysilicon umaleko otyebileyo we-100 nm. Njengoko umntu unokulindela, inkqubo enjalo inde kakhulu, inomlinganiselo we-23 m ubude. Isixhobo sinomjikelezo wolondolozo olucwangcisiweyo lwenyanga ye-1, apho inkampani ilindele ukunweba kwiinyanga ezi-2. UJietai liqabane lezixhobo zeJolywood kwi-J-TOPCon 2.0 ubuchwepheshe obusekelwe kwi-POPAID. UJietai uye wakha isixhobo esinye sokuvelisa ngoku kwaye ulindele ukuthumela izixhobo ze-POPAID ze-5 GW ekupheleni kwalo nyaka, ngokukodwa eJolywood. “Sithengiswe kakhulu kulo nyaka,” utshilo uShang. Inkampani inyusa indawo yayo yemveliso, okuthetha ukuba iya kuhlonipha iiodolo zabanye kulo nyaka uzayo.
Ipolar PV ibonakala ilandela ngokusondeleyo uyilo lwe-reactor ye-Jietai kwaye ibonise inkqubo yayo ye-PVD ethe nkqo yemagnetron kwinkomfa kulo nyaka uphelileyo. Isixhobo senzelwe ukucubungula umthwali kunye ne-slots ye-60 kwi-6 x 10 uqwalaselo kunye nexesha lokujikeleza kwe-40 ukuya kwi-50 imizuzwana. Isixhobo senzelwe ukufezekisa onke amanyathelo ayimfuneko kwinkqubo ye-TOPCon; usebenzisa ifilimu yesilicon oxide, efakwe kwi-situ doped ipolysilicon umaleko wokubekwa. Nalapho inani lamanyathelo okuqhuba lincitshiswe kakhulu xa kuthelekiswa neLPCVD. Ukuseta i-reactor ixhotyiswe ngegumbi eliphantsi le-oksijini ye-oksijini yeplasma ye-oxidation yokwenza i-tunnel oxide kwindawo ecocekileyo ye-plasma yegesi. Umthombo we-ionization kwakhona ukugcinwa simahla. Umaleko we-silicon ye-amorphous, efakwe kusetyenziswa iithagethi ze-silicon ezijikelezayo kunye ne-in-situ doping, iphunyezwa ngokungeniswa kwegesi yedoping.
I-PVD ineenzuzo ezininzi ngaphezu kwe-LPCVD ebambeleyo. Eyokuqala kunye neyona nto iphambili, ngokwe-Polar PV, yindleko ephantsi yokusebenza kunye nokugcinwa okuphantsi. Oku kongiwa kweendleko kuvela kwinto yokuba le nkqubo ayibandakanyi i-quartz-ware, eyona ndleko inkulu yenkqubo ye-LPCVD. Ngaphezu koko, ukuba yinkqubo yecala elinye, ukusonga kuba ngumba omncinci, okunceda ngakumbi ukonga iindleko. Isixhobo sePVD sePolar sixhasa izinto eziphumayo ukuya kuthi ga kwi-10,000 lawafers ngeyure.
Ukusetyenziswa kwamandla ngenye indlela ebalulekileyo yokunciphisa iindleko apho i-PVD ikhanya khona. I-PV yePolar ibalaselisa ukuba i-PVD isebenzisa i-77% yamandla ombane ukugquma kunye ne-16% ukufudumeza. Ngokwahlukileyo, la manani angama-34% kunye nama-45%, ngokulandelanayo, kwimeko ye-CVD. Oku kuthetha ukuba ukusetyenziswa kwamandla kwi-PVD kungcono kakhulu kune-CVD, okt, asetyenziswe apho kubaluleke kakhulu.
I-PVD ikwafumana amanqaku aphezulu ngokwenkqubo yezinto ezisetyenziswayo. Isebenzisa iithagethi zesilicon ezinexabiso eliphantsi kakhulu kunesilane esetyenziswa njengesandulela kwi-LPCVD. Kwicala le-flip, i-PVD ineCapEx ephezulu kunye neenyawo ezinkulu.
Von Ardenne, kunye neminyaka emininzi yamava ekwakheni i-PVD reactors, iye yaphuhlisa isisombululo se-TOPCon PV esekwe kobu buchwepheshe. Isisombululo senkampani yaseJamani kunxibelelwano olugqithisiweyo lusekwe kwi-amorphous silicon kwi-silicon oxide - isekwinqanaba lophuhliso, kodwa ngeziphumo zokuqala ezikhuthazayo nangona kunjalo. Xa sele ilungile, uVon Ardenne uceba ukuphumeza inkqubo kwiqonga layo eliphezulu lezixhobo zePVD, okwangoku elikwaziyo ukusetyenzwa ngaphezulu kwama-wafers angama-10,000 ngeyure.
Njengoko namhlanje ihashe lomsebenzi womzi-mveliso welanga useziseli ze-PERC, iTaiyangNews iya kuququzelela inkomfa ebonakalayo yokuPhucula ii-PERC iiseli ukuya kwimida yayo nge-22 kaMatshi ka-2022.
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